Advanced Research Manufacturing

Innovative High Purity Gas Supply System Solutions

Ph: 719.538.5959   E-Mail

High Purity Filters

 

ARM’s series of in-line gas filters are available in stainless steel, Nickel and PTFE/PFA membranes to meet the demanding needs of many applications including, semiconductor, gas cabinets, specialty gas mixing, and process tool gas panels.

 

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High Purity Filters Brochure (PDF) (coming soon)

Features & Benefits

 

     • Flow rates to 150.0 slpm

     • Low pressure drop

     • Bakeable (stainless and

       Nickel)

     • 316L stainless HP & UHP

       construction

     • Pressure to 20.5 MPa

     • 9 log particle retention

     • 99.9999999% removal of

       0.003mm and larger particles

     • <1 particle/ft3, <10 PPB

       THC , and <10 PPB moisture

Options

 

     • Sub-micron particle filtration

     • Factory preconditioning

     • Variety of inlet / outlet

       connections

     • High pressures to 3000 PSIG

     • High bulk flow rates

 

 

 

ARM Inc point-of-use particle filters

Applications

 

     • Inert and corrosive gases

     • Analytical equipment

     • Semiconductor processing

       equipment

     • Pharmaceutical production

 

ARM Inc point-of-use particle filtration products

connect with us:

ARM Inc., 3685 South Highway 85-87, Suite 2, Colorado Springs, Colorado 80906

 

Ph: 719-538-5959  | FAX: 719-538-5960 | EMAIL: sales@arminc.com

 

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.....keep it simple

     .....keep it clean

          .....keep it flowing